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Femtosecond Laser Process Targets Depth-Controlled 4H-SiC Wafer Slicing (Texas A&M, KIMM, UST)

Researchers from Texas A&M University, KIMM, and UST published a technical paper titled “Self-Focusing Control for Depth-Precise Wafer Slicing of 4H-SiC in Femtosecond Laser Processing.” Abstract Excerpt: “Femtosecond laser slicing for 4H-SiC wafers offers a non-contact processing approach to produce thin layers with low defects, while strong optical nonlinearities obscure the relationship between the laser parameters and the resulting slicing q…
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Semiconductor Engineering broke the news on Monday, August 10, 2026.
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