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China crafts working 3nm gate-all-around transistors without EUV — stacked nanosheets target 3nm without EUV, but full node remains distant

Summary by Tom's Hardware
As China's IMECAS demonstrates its ability to build GAA transistors without using DUV tools allegedly for 3nm-class process technology, the country remains years away from any practical implementation of a 3nm-class node.
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The Institute of Microelectronics of the Chinese Academy of Sciences demonstrated GAA transistors of stacked nanolamps manufactured with DUV lithography per dive. The result validates an experimental route to 3 nm technologies without EUV, but still does not amount to a commercial manufacturing process nor does it demonstrate that China can produce chips of that node on a large scale.

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Tom's Hardware broke the news on Monday, September 21, 2026.
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