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Advanced Spectral Technology to Demonstrate the Zentura Wafer-Level Metrology System at the 2026 Kyushu Semiconductor Industry Exhibition
Advanced Spectral Technology, Inc. will demonstrate its Zentura Wafer Level Metrology System at the 2026 Kyushu Semiconductor Industry Exhibition in Fukuoka City, Japan, on September 30 and October 1, 2026.
AST will showcase a live Zentura system at the NANYO Corporation booth with an AST applications engineer available for technical discussions during the exhibition.
The Zentura system measures wafer thickness, adhesive layer thickness, etch depth, wafer shape, and vision-based critical dimensions on wafers up to 300mm with high precision.
Zentura is a configurable platform that supports manual or fully automated loading, integrates different sensor technology to match specific wafer-level metrology requirements, and is compatible with ISO 5 and ISO 4 cleanroom standards.